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            将本页翻译成中文
            您现在的位置:首页> 外文会议>Conference on Advanced Laser Technologies 2005 pt.2; 20050903-06; Tianjin(CN) >文献详情

            【24h】 The dynamic stress in micro-structures studied by Raman spectroscopy

            【摘要】Stress distribution is one of the main factors influencing the reliability of MEMS (Micro Electro Mechanical System) structure. In most cases, MEMS devices work in motion state, the dynamic stress often affects the performances of the MEMS devices. For the first time, dynamic streses were measured by means of Raman spectroscopy and high-frequency modulation technology, the measurement result shows that dynamic stress at a certain point in silicon micro-resonator is in agreement with the analysis of theory.

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